FIELD: optical instruments. SUBSTANCE: matrix has active matrix, MxN matrix of thin-film driving structures, each of which has at least one thin-film layer of material which induces movement, pair of electrodes which are located on upper and lower surfaces of thin-film layer of material which induces movement, MxN matrix of support members, each of which is used for fixation of respective driving structures, MxN matrix of intermediate members, each of which is located on upper surface of respective driving structures, MxN matrix of mirror layers for reflecting light beams. Each mirror layer is mounted on respective intermediate members. Electric signal is applied to electrodes of thin-film layer of material which induces movement, thus causing its deformation, which drives mirror layer which is mounted on intermediate member. EFFECT: simplified manufacturing process, increased output ratio and reliability. 37 cl, 18 dwg
