FIELD: semiconductor microelectronics. SUBSTANCE: underside or face side of IC board has metal-coated depression whose metal coat serves as lower plate of capacitor; remaining part of board under depression functions as capacitor insulator; its upper plate is located on face side of board and functions as part of metal coating configuration; thickness of remaining part of board in depression is 1-400 mcm. EFFECT: improved electrical characteristics and reduced mass and size of integrated circuit. 8 cl, 5 dwg
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Authors
Dates
1999-09-10—Published
1996-09-26—Filed