MANUFACTURING METHOD OF TEMPERATURE SENSORS AND HEAT FLOW (VERSIONS) Russian patent published in 2015 - IPC G01K7/34 G01K17/08 H01L27/16 

Abstract RU 2537754 C1

FIELD: measurement equipment.

SUBSTANCE: invention refers to measurement equipment and can be used in aviation and space technology. Obtaining temperature sensor and heat flow may be implemented directly on model surface of various degree of curvature without cockles and damage of integrity of the model and physical process of flowing on model surface and gas flow. Sensors thermocouples are manufactured from chromel-constantan film by method of cathode sputtering in vacuum. As insulating foil between the model and thermocouple, between thermocouples, chosen is aluminium oxide. Upper surface of thermocouple is protected from oxidation by heat resisting insulating foil with width of 0.80-0.1 mcm. Width of coating with thermocouple outputs is 0.3-0.4 mcm. Coatings with outputs are formed through masks (from metal or polyimide film) and by method of electrography by "pencil" voltage of 6-10 V.

EFFECT: increasing functional capabilities of temperature sensors and heat flow.

2 cl, 3 dwg

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RU 2 537 754 C1

Authors

Kazarjan Akop Ajrapetovich

Dates

2015-01-10Published

2013-08-05Filed