METHOD FOR DETECTION OF IMPLANTED LAYER Russian patent published in 2000 - IPC

Abstract RU 2148811 C1

FIELD: instruments, engineering, in particular, for express detection of ion implantation of surface layer of stainless steel by means of analysis of electrolyte-plasma treatment current. SUBSTANCE: signals from detector of alternating current constituent upon electrolyte- plasma treatment are processed by means of decomposition of total signal into amplitude spectrum. Amplitude spectrum is designed as distribution of probabilistic density of entrance of local maximum in specific range of values. Presence of implanted layer is judged by presence of at least 30% values in negative region of amplitude spectrum. EFFECT: increased speed and fidelity. 2 dwg

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RU 2 148 811 C1

Authors

Amirkhanova N.A.

Smyslov A.M.

Nev'Jantseva R.R.

Timergazina T.M.

Izmajlova N.F.

Parfenov E.V.

Dates

2000-05-10Published

1998-08-17Filed