FIELD: deposition of carbon diamond- like coat on machined articles. SUBSTANCE: pulse source has consumable graphite electrode and anode having common geometric axis electrically coupled to capacitive storage circuit and placed in case of vacuum chamber. Consumable graphite electrode has largest diameter approximately equal to largest size of machined surface of article on which coat is deposited in plane facing machined article. Aid to initiate arc includes at least two ignition units arranged over perimeter of consumable graphite electrode and in close proximity to it. Longitudinal axis of each one is directed on to corresponding region of working surface of consumable graphite electrode for initiation of arc discharge. Pulse source of carbon plasma has additional electrode, first and second capacitors, adjustable inductance coil to maintain electric coupling of consumable graphite electrode with capacitive storage circuit. EFFECT: widened zone of deposition of carbon diamond-like coat, increased uniformity of thickness of produced coat, enhanced reliability of initiation of pulse arc discharge, improved control and adjustment of energy characteristics of carbon plasma. 8 cl, 5 dwg
Title | Year | Author | Number |
---|---|---|---|
DEVICE FOR APPLICATION OF COATINGS IN VACUUM | 1999 |
|
RU2186151C2 |
METHOD FOR MANUFACTURE OF CONDUCTING ALLOY-TREATED DIAMOND-LIKE NANOCOMPOSITE FILM AND CONDUCTING ALLOY-TREATED DIAMOND-LIKE NANOCOMPOSITE FILM | 2000 |
|
RU2186152C2 |
PROCEDURE FOR FORMING SUPER HARD AMORPHOUS CARBON COATING IN VACUUM | 2009 |
|
RU2430986C2 |
METHOD AND APPARATUS FOR PREPARING BIOCARBON | 1996 |
|
RU2095464C1 |
METHOD OF OBTAINING MULTILAYER WEAR-RESISTANT DIAMOND-LIKE COATINGS | 2020 |
|
RU2740591C1 |
VACUUM TREATMENT PLANT AND METHOD OF VACUUM TREATMENT | 2008 |
|
RU2472869C2 |
METHOD OF PULSE-PERIODIC ION AND PLASMA TREATMENT OF PRODUCT AND DEVICE FOR ITS REALIZATION | 1996 |
|
RU2113538C1 |
METHOD OF FORMING PROTECTIVE COATING BASED NON-CRYSTALLINE CARBON FILM | 2013 |
|
RU2530224C1 |
PULSE DRIVER OF NANOSECOND PULSE GENERATOR | 2002 |
|
RU2226030C1 |
METHOD OF PRODUCING DIAMOND-LIKE CARBON AND DEVICE TO THIS END | 2013 |
|
RU2567770C2 |
Authors
Dates
2000-07-27—Published
1999-06-02—Filed