DEVICE FOR APPLYING COATS UNDER VACUUM Russian patent published in 2000 - IPC

FIELD: application of single-layer and multi-layer coats on large-sized parts. SUBSTANCE: proposed device includes vacuum chamber, evacuation system, unit for attachment of parts, plasma sources of materials for coats, gas ion source, gas supply system, power supply sources and control unit; coat material sources are located on vacuum chamber in several tiers at equal number in each tier; provision is made for relative shutting-off of plasma flows in area of attachment of parts; gas ion source has central and outer cathodes forming closed extended slot for discharge of ion flow; its length corresponds to distance between lower and upper tiers of coat application sources. EFFECT: increased productivity; improved quality of coats. 3 cl, 2 dwg