METHOD OF VACUUM-ARC COATING Russian patent published in 2009 - IPC C23C14/40 

FIELD: metallurgy.

SUBSTANCE: invention relates to method of vacuum-arc coating and can be used for receiving of degasifying coatings. Method includes moulding of metallic plasma stream from cathode spots of vacuum-arc discharge. Coating is implemented at constant initial temperature of cathode for each following treated set of details. For this intermittently it is changed groove diametre, located in cathode body from the side of cooling system, according to expression where D₁ - groove diametre, [m]; D_c - cathode diametre, [m]; µ - electric power transmission coefficient, [kg/ coulomb]; I_disch - value of discharging current, [A]; ρ - density of cathode material, [kg/m³]; S_K - area of butt (operational) cathode surface; [m²]; L₁ - groove width, [m]; t - full time of cathode operation time, spent for all previous sets of treated details [s]. As a result it is received plasma stream with constant compound of generated dripping phase, providing reproductibility of result's properties, formed coatings, and improvement of coating. Furthermore method is long-range during receiving of anti- emissive coatings on grid electrodes of high-power transmitting terminal.

EFFECT: development of advantageous process of degasifying coatings receiving.

1 dwg