INSULATING FILM SERVICEABILITY CHECK METHOD Russian patent published in 2001 - IPC

Abstract RU 2167470 C2

FIELD: nondestructive methods for diagnosing structural integrity of insulating layers deposited on substrate. SUBSTANCE: method involves ellipsometric measurements of film refractive index; in the course of measurements film is elastically deformed to build up tensile stresses in it and its condition is recognized by changes in refractive index caused by deformation. EFFECT: enhanced sensitivity of check due to reduced deformation of films. 1 tbl

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RU 2 167 470 C2

Authors

Skupov V.D.

Smolin V.K.

Dates

2001-05-20—Published

1999-04-13—Filed