FIELD: machine engineering, namely, precision positioning systems, possibly for precision machine tools, high-accurate copying apparatuses, photolitographic complexes in electronic industry. SUBSTANCE: method comprises steps of forming electrically conductive coating on basic surface of guide made of dielectric material and on zones of end portions of basic surface of movable member; placing movable member to predetermined position and controlling gap value between basic surface of guide and end portions of respective basic surface of movable member by means of capacitive pickups; at controlling position of movable member relative to basic coordinate system comparing values of above mentioned gaps and providing their equality. EFFECT: possibility for providing nanometric accuracy degree due to improved authenticity of measurement results at sampling positions of movable member. 1 dwg
