METHOD OF PRODUCTION OF BERYLLIUM AND BERYLLIUM- CONTAINING FOIL Russian patent published in 2002 - IPC

FIELD: manufacture of self-carrying thin filmsfoils used for windows in recording low-energy radiation; applied physics; metal working and other industries. SUBSTANCE: proposed method includes application of layer on substrate excluding diffusion of material of foil in substrate followed by multi-stage deposition of layers of material of foil and separation of foil from substrate. Layers are formed by deposition of material obtained by magnetron spraying of target through repeated motion of surface of substrate and/or at least one flux of plasma relative to each other at rate ensuring growth of crystals of material of layer oriented obliquely to plane of substrate; inert gas used for forming plasma contains admixtures whose total partial pressure is less than 1-10^-5 Pa. EFFECT: improved quality of foil. 5 cl, 2 tbl