INSTALLATION FOR COATING DEPOSITION Russian patent published in 2003 - IPC

FIELD: application of metallic coatings onto different -designation articles, possibly used in electrical-, radio engineering, jewellery industry branches. SUBSTANCE: installation includes vacuum chamber; target-cathode sprayers at least with two anode units; apparatuses for evacuating and controlling gas supply; attachment for mounting holders; device for rotating said attachment. Holders for substrates are driven to rotation in the same direction; above mentioned attachments are driven to rotation in other direction. Target-cathode sprayers are arranged in such a way that their axial lines form angle no more than 90 degrees and are mutually shifted along height. There are false walls on inner surface of chamber. Holders of substrates are in the form of prisms. Substrates and anode units of sprayers are galvanically connected one with another and with positive electrode. Target-cathodes and false walls are galvanically connected one with another and with negative electrode. Between attachment for mounting holders and device for rotating it there is screen galvanically insulated relative to chamber. Installation provides application of coatings onto the whole surface of substrates including their back side. EFFECT: enhanced quality of applied coatings. 2 dwg, 3 ex