METHOD AND APPARATUS FOR PRODUCING BERYLLIUM OR BERYLLIUM-CONTAINING FOIL Russian patent published in 2002 - IPC

FIELD: applied physics, mechanical engineering, metal working. SUBSTANCE: method involves preparing substrate surface; applying to said surface underlayer preventing foil material from diffusion into substrate; providing deposition of foil material layers and separating produced foil from substrate. At least two targets are used for obtaining foil by magnetron spraying. One of said targets is comprised of metal-getter reacting with plasma forming admixtures of inert gas delivered into anode gap of magnetron designed for spraying of metal-getter. Method further involves cleaning inert gas from sprayed metal-getter and product of reaction thereof with said admixtures and directing to beryllium target at rear side of substrate. Apparatus has vacuumizer, at least two magnetrons, substrate holder, system for supplying, flow rate regulating, cleaning and evacuating of inert gas. One of magnetrons has metal-getter target. Anode gap of said magnetron is communicated with inert gas supplying and flow rate regulating system. Said magnetron is positioned at rear side of movable substrate and is separated from substrate by inert gas cleaning system. Method and apparatus are adapted for production of self-bearing thin films used in low-energy radiation registration windows. EFFECT: increased efficiency and improved quality of beryllium and beryllium-containing foil. 3 cl, 1 dwg, 2 tbl, 3 ex