METHOD FOR PLASMA DEPOSITION OF POLYMERIC COATINGS AND METHOD FOR PLASMA GENERATION Russian patent published in 2002 - IPC

FIELD: processes for applying coatings onto metallic and dielectric substrates, namely, at using plasma polymerization and plasma generation. SUBSTANCE: method for plasma deposition of polymeric coating comprises steps of placing treated sample to discharge space; filling discharge chamber with reaction gas containing at least one gaseous monomer capable to plasma polymerization; generating plasma in discharge space at igniting and sustaining periodic gas discharge with periodically repeated pulse train. At process of plasma polymerization of gaseous monomer polymeric coating is deposited upon surface of treated sample. In order to provide plasma polymerization, periodic-pulse discharge with total duration of electric current change for separate pulse of discharge in range (10^-7-10^-1) s is realized. Pause duration between separate pulses of each pulse train is selected in range (10^-5-10^-2) s. It is possible to preliminarily clean and to modify surface of treated sample before deposition of polymeric coating, or it is possible to apply protective and/or intermediate adhesion coating by plasma deposition method. EFFECT: enhanced efficiency of plasma polymerization process, continuous technological process, improved quality of deposited coating, possibility for controlling parameters of process. 22 cl, 3 dwg