DEVICE FOR ULTRASONIC CLEANING OF PLATES Russian patent published in 2002 - IPC

FIELD: ultrasonic cleaning of plates; manufacture of semiconductor devices; cleaning plates by means of ultrasound and megasound. SUBSTANCE: proposed device includes bath filled with washing solution, ultrasonic vibrator mounted on bottom of bath, cassette with plates and plate motion mechanism made in form of shaft having form of tetrahedron in section; it is kinematically connected with rotation drive and is mounted in front and rear struts of rotation mechanism beyond zone of action of vibrator. One edge of tetrahedron has longitudinal slot where flexible plate is placed; this plate is made from material resistant to washing solution; tetrahedron is made from fluoroplastic. EFFECT: enhanced uniformity of cleaning; improved quality of cleaning; extended technological capabilities and simplified construction. 4 dwg