FIELD: microelectronic instrumentation engineering. SUBSTANCE: microactuator has base in the form of frame, electric heater, and actuating member of silicone material suspended in frame window from at least one movable plate for displacement in plane perpendicular to frame surface as result of thermal expansion of movable plate heated by electric heater. Actuating member, movable plate, and electric heater are made of silicon carbide as integral part in the form of bridge thrown over frame window and connected to power supply. Low-inertia version of microactuator is also proposed. EFFECT: simplified design, enhanced operating reliability under extreme temperature conditions. 3 cl, 3 dwg, 3 tbl
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