METHOD FOR PRODUCING ADDRESSED AUTOEMISSION CATHODE AND DISPLAY STRUCTURE BUILT AROUND IT Russian patent published in 2002 - IPC

FIELD: microelectronics. SUBSTANCE: method involves deposition of emissive layer onto components of addressed autoemission cathode by gas-cycle synthesis in hydrogen stream using carbon-containing gas for the purpose. Insulating substrate is made of high-temperature material and discrete components of cathode, of high-temperature metal. Rate of rise of emissive layer on insulating layer is attained lower than that on discrete metal components due to adequately chosen conditions for deposition of carbon-containing emissive layer, that is, selection of temperature of substrate and reactor threads, rate of pumping gas mixture through reactor, distance between reactor metal threads and substrate as well as between grid screen and substrate, and deposition time. Metal discrete components of cathode may be made of two metal layers. Upper metal layer is removed to form desired configurations of remaining part of layer. Layer materials are chosen with regard to their emissive characteristics which should ensure desired current from upper metal layer only. In producing display structure control grid is formed from metal layer having emission threshold exceeding field strength at which cathode emits desired current. EFFECT: enhanced characteristics of planar displays at high productivity and low cost. 14 cl, 3 dwg, 5 ex