FIELD-EMISSION ELEMENT WITH CATHODES BASED ON CARBON NANOTUBES AND METHOD OF ITS MAKING Russian patent published in 2016 - IPC H01J9/02 B82B1/00 H01J1/304 

FIELD: electricity.

SUBSTANCE: invention relates to vacuum and solid-state electronics, particularly to field-emission elements based on carbon nanotubes (CNT), used as cathodes: to diodes, to triodes and to devices based on them. Field-emission element with cathodes based on carbon nanotubes includes semiconductor substrate, on surface of which there is insulating layer, cathode assembly located above insulating layer consisting of current-carrying and contact layers and carbon nanotubes (CNT), located on surface of contact layer, support-focusing system, consisting of first dielectric, gate conductive and second dielectric layers arranged on upper surface of cathode assembly and containing through cavity, anode current-carrying layer arranged on outer surface of second dielectric layer support-focusing system, in which through process holes are formed. Carbon nanotubes are located parallel to surface of semiconductor substrate, on surface of carbon nanotubes layer of hafnium oxide is applied, which reduces work function of electrons from surface of CNT and protecting surface of emitting CNT against external factors, reducing value of contact resistance nanotube-substrate at annealing formed structure of field-emission element.

EFFECT: improved field emission current and time stability of this value, reduced working voltages in instruments of vacuum microelectronics on basis of carbon nanotubes and longer service life thereof.

3 cl, 6 dwg