PROCESS OF ACCELERATED GROWING OF LARGE-DIAMETER SEMICONDUCTOR CRYSTALS BY WAY OF THEIR COOLING THROUGH MELT AND EFFECT OF ELECTROMAGNETIC FIELDS ON BUILD-UP OF MELT SUPERCOOLING Russian patent published in 2003 - IPC

Abstract RU 2203987 C2

FIELD: technology of production of semiconductor monocrystals of silicon. SUBSTANCE: electromagnetic fields setting melt in motion are utilized to build up supercooling in boundary layer between melt and face of growing crystal. As result heat is removed mainly through melt. Productivity of process with its optimization rises by factor of ten for crystals having diameters 300- 500 mm. EFFECT: raised productivity of process. 3 dwg _

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RU 2 203 987 C2

Authors

Prokhorov A.M.

Petrov G.N.

Borisov V.T.

Ljashchenko B.G.

Dates

2003-05-10Published

2001-06-26Filed