SILICON MONOCRYSTAL PRODUCTION METHOD Russian patent published in 1995 - IPC

Abstract RU 2042749 C1

FIELD: semiconductor metallurgy. SUBSTANCE: method involves applying DC magnetic field with induction of 0.03-0.06 T, with crucible and crystallizer being rotated. Crucible has spherical bottom. Ratio of crucible diameter dc and crystallizer diameter dcr is dc≥ 3,15dcr. EFFECT: increased efficiency and high quality of monocrystals. 3 dwg, 1 tbl

Similar patents RU2042749C1

Title Year Author Number
METHOD FOR GROWING SILICON SINGLE CRYSTALS 1995
  • Sal'Nik Z.A.
  • Mikljaev Ju.A.
RU2077615C1
METHOD OF GROWING SILICON MONOCRYSTALS 1995
  • Sal'Nik Z.A.
  • Mikljaev Ju.A.
RU2076909C1
METHOD OF PREPARING UNIFORMLY ALLOYED SILICON monocrystals 1993
  • Sal'Nik Z.A.
  • Mikljaev Ju.A.
  • Naumov A.V.
  • Sal'Nik O.S.
  • Fomichev A.V.
  • Volkov V.I.
RU2076155C1
METHOD OF PRODUCTION OF MONOCRYSTALLINE SILICON 1999
  • Remizov O.A.
  • Dzhej Jun Kvon
RU2193079C1
SILICON MONOCRYSTAL GROWING METHOD 1991
  • Khuditsyn E.A.
SU1824958A1
PROCESS OF ACCELERATED GROWING OF LARGE-DIAMETER SEMICONDUCTOR CRYSTALS BY WAY OF THEIR COOLING THROUGH MELT AND EFFECT OF ELECTROMAGNETIC FIELDS ON BUILD-UP OF MELT SUPERCOOLING 2001
  • Prokhorov A.M.
  • Petrov G.N.
  • Borisov V.T.
  • Ljashchenko B.G.
RU2203987C2
METHOD OF PRODUCTION OF THE SINGLE-CRYSTAL SILICON (VERSIONS) 2005
  • Remizov Oleg Alekseevich
RU2278912C1
METHOD FOR GROWING OF HOLLOW CYLINDRICAL SINGLE CRYSTALS OF SILICON BASED ON CHOKHRALSKY METHOD AND DEVICE FOR ITS REALISATION 2007
  • Kozhitov Lev Vasil'Evich
  • Kondratenko Timofej Timofeevich
  • Krapukhin Vsevolod Valer'Evich
  • Kazimirov Nikolaj Ivanovich
  • Sorokin Sergej Leonidovich
  • Taradej Vladimir Aleksandrovich
  • Bliev Aleksandr Petrovich
  • Silaev Ivan Vadimovich
RU2355831C2
MONOCRYSTALLINE SILICON OBTAINING METHOD 1995
  • Remizov O.A.
  • Karavaev N.M.
RU2057211C1
APPARATUS FOR GROWING SINGLE CRYSTALS OF GALLIUM ARSENIDE BY THE CZOCHRALSKI METHOD 2021
  • Knyazev Stanislav Nikolaevich
  • Romanenko Aleksandr Aleksandrovich
  • Zykova Eleonora Maisovna
  • Martynov Igor Dmitrievich
  • Yugova Tatyana Georgievna
RU2785892C1

RU 2 042 749 C1

Authors

Sal'Nik Z.A.

Mikljaev Ju.A.

Dates

1995-08-27Published

1992-07-21Filed