TRANSFER METHOD AND DEVICE FOR MANUFACTURING IMAGE CONVERTERS OF THIRD GENERATION Russian patent published in 2003 - IPC

FIELD: electronic engineering; image converter manufacture. SUBSTANCE: method includes periodic loading of groups of electron-package assemblies into gateway chamber, thermal degassing and cleaning of electron-package assembly groups by bombarding them in superhigh-vacuum chambers designed for thermal degassing and electron cleaning, periodic loading of photocathode assembly groups in gateway chamber, thermal predegassing of photocathode assembly groups in pre-degassing superhigh-vacuum chamber, total finishing cleaning of photocathode assembly groups, production of photocathodes in finishing cleaning superhigh-vacuum chamber, production of photocathode, coupling of electron-package and photocathode assemblies in superhigh-vacuum assembly chamber, sealing of coupled groups of photocathode and electron-package assemblies in superhigh-vacuum sealing chamber, and periodic discharge of finished groups of vacuum units to gateway chamber. In the process electron-package and photocathode assemblies are cleaned and degassed in steps from low-vacuum to superhigh-vacuum level of P≤10^-8 Pa by transferring groups of assemblies from chamber where gas concentration is high to that where this concentration is lower; all steps of the treatment of electron-package and photocathode assembly groups are conducted in all chambers simultaneously, photocurrent through circuit of one of photocathode assemblies or that through all photocathode assemblies being monitored by computer; superhigh-vacuum chambers for finishing cleaning and production of GaAs photocathode groups have finishing cleaning section for photocathode assembly groups and section for producing GaAs photocathode groups. EFFECT: enhanced quality and capacity. 3 cl, 3 dwg