FIELD: measurement equipment.
SUBSTANCE: invention relates to measurement equipment and may be used in aerodynamical experiments, in power engineering of turbine machines when researching gas flow structure in fluid. Sensor design is developed on the basis of polyimide film. On this film they generate sensor design of moderate temperatures up to 300°C on the surface of items by the method of cathode sputtering of metals in vacuum. The cathode method of sputtering makes it possible to spray an insulating film from aluminium oxide and a protective film for protection of items (model) from oxidation. The sensitive element is manufactured, for instance, from nickel, collecting outputs are formed from gold or other materials. Elements of sensors are formed, using two masks or by means of electrical engraving. Prior to metallisation the surface of the polyimide film is activated by the method of glow discharge. Optimal methods of metallisation in vacuum plants are chosen.
EFFECT: invention provides for expansion of application field, increased accuracy and reliability of measurement during research of gas and fluid flow.
4 cl, 1 tbl, 2 dwg
Title | Year | Author | Number |
---|---|---|---|
MANUFACTURING METHOD OF TEMPERATURE SENSORS AND HEAT FLOW (VERSIONS) | 2013 |
|
RU2537754C1 |
PRESSURE AND TEMPERATURE-SENSITIVE ELEMENT | 1998 |
|
RU2145064C1 |
CAPACITIVE PRESSURE SENSOR AND METHOD OF ITS MANUFACTURE | 1996 |
|
RU2099681C1 |
CAPACITIVE INERTIAL PRESSURE SENSOR, METHOD OF ITS ASSEMBLY AND METHOD OF PRESSURE MEASURING | 2015 |
|
RU2589494C1 |
METHOD FOR MANUFACTURE OF GAS AND LIQUID FLOW VELOCITY SENSOR | 2007 |
|
RU2353998C1 |
PYROELECTRIC PRESSURE TRANSDUCER AND METHOD FOR ITS ASSEMBLY | 1999 |
|
RU2157979C1 |
MATRIX THIN-FILM TRANSDUCER | 1992 |
|
RU2063009C1 |
CAPACITIVE PRESSURE SENSOR AND METHOD OF ITS MANUFACTURE | 1995 |
|
RU2099680C1 |
PRESSURE AND TEMPERATURE SENSITIVE ELEMENT | 1996 |
|
RU2110778C1 |
METHOD OF FORMING CONTACT PADS ON YBACUO FILMS | 2013 |
|
RU2538932C2 |
Authors
Dates
2015-04-20—Published
2013-08-05—Filed