DEVICE FOR PRECISION MEASUREMENT OF DISTANCES Russian patent published in 2004 - IPC

FIELD: measuring technology. SUBSTANCE: device for precision measurement of distances includes two sectionalized electrodes mounted in opposition one another for movement in direction of change of area of their mutual overlapping with preservation of constancy of gap between mutually inverted surfaces of sections of above-mention electrodes. Sections in first and second sectionalized electrodes have equal length, sections of first electrode are electrically intercoupled and connected to first output of generator of variable voltage. Sections of second sectionalized electrode are electrically insulated from one another, each section is connected to corresponding input of system establishing moment of transition of difference of currents through zero in networks of two adjacent sections of this sectionalized electrode. One more input of abovementioned system is connected to second output of generator of variable voltage and length of any section of first sectionalized electrode is different from length of any section of second sectionalized electrode by value equal to specified resolving power of device. EFFECT: increased resolving power of device up to nanometer range with technologically allowable limitations for manufacture of sections of electrode by length. 1 cl, 1 dwg