METHOD OF RESTORATION OF PROBES FOR NANOTECHNOLOGY Russian patent published in 2004 - IPC

FIELD: nanotechnology; methods of restoration of probes.

SUBSTANCE: the invention is dealt with the field of nanotechnology, in particular, with methods of restoration of probes. The offered method of restoration of the worn out surfaces of the tungsten probes provides for ionization of a noble gas by electrons excited by the crossed electrical and magnetic fields, bombardment by an ionization noble gas of a cathode-target and deposition of tungsten on the worn out surfaces of the tungsten probes. At that a package of the worn out tungsten probes is fixed on the substrate with the probes installed there and spaced from each other by a distance equal to two diameters of a probe, and before deposition of tungsten the package is applied with a negative potential of 500-700 V. The technical result is that the invention ensures possibility of tungsten deposition on the worn out surfaces of the tungsten probes.

EFFECT: the invention ensures possibility of tungsten deposition on the worn out surfaces of the tungsten probes.

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