PRODUCTION OF COATING FROM TITANIUM NITRIDE AT CARBIDE INSERTS IN GLOW DISCHARGE WITH HOLLOW CATHODE EFFECT Russian patent published in 2016 - IPC C23C14/06 C23C14/38 

FIELD: metallurgy.

SUBSTANCE: claimed process comprises the cleaning of plate surface by ion bombardment and TiN evaporation thereon by deposition in reactive gas, i.e. titanium ion nitrogen, from the plasma generated by vacuum-arc generator in the direction of anode fitted in the cathode. Note here that the anode is composed by the set of carbide inserts of the total surface area S_a meeting the following requirement: S_a<(2m/M)^l/2S, where S is the hollow cathode surface area, m and M are electron and ion masses, respectively.

EFFECT: higher quality of coating.

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