INTEGRATING MICROMECHANICAL GYRO Russian patent published in 2005 - IPC

FIELD: measurement technology; integral electronics.

SUBSTANCE: device is used for measuring angular velocity. Integrating mechanical gyro has semiconductor substrate onto which electrodes of capacitive converters and electrodes of electrostatic dives are disposed. Electrodes are made of semiconducting material. Device also has four inertial masses made in form of plates of semiconducting material and disposed to have gaps relatively substrate to form flat capacitors with electrodes of displacement capacitive converters due to partial overlapping. Masses interact with electrodes of electrostatic drives at the surface of their plates through side gaps. Inertial masses and electrodes are disposed to form two pairs of sensitive elements which are disposed along two mutually perpendicular axes at the plane of substrate. Angular velocity is measured around axes X and Y disposed mutually perpendicular at the plane of substrate and axis Z directed in perpendicular to plane of gyro's substrate.

EFFECT: improved precision of measurement.

4 dwg