INTEGRATING MICROMECHANICAL GYRO Russian patent published in 2005 - IPC

FIELD: measurement engineering; integrated electronics.

SUBSTANCE: device belongs to measuring integrated elements of value of angular velocity. Gyro has substrate, electrodes of movement capacitive converters disposed onto substrate, two inertial masses disposed with a gap to substrate and made in form of semiconductor plates which form flat capacitors with electrodes of capacitive converters due to total overlapping, and motionless electrodes of electrostatic drives made of semiconductor material and disposed onto substrate. Gyro also gas sixteen additional electrodes of capacitive movement converters made of semiconductor material and disposed onto substrate to form flat capacitors with inertial masses due to partial overlapping of rakes of electrodes. Device also has one additional motionless electrode of electrostatic drive having rake-shaped structure which electrode is made of semiconductor material and disposed onto substrate and four additional movable electrode of electrostatic drives having rake-shaped structure made of semiconductor material and disposed to have gap relatively substrate for electrostatic interaction with motionless electrodes at surface of their plates through side spaces and mutually penetrating rakes. Gyro also has two additional supports made of semiconductor material and disposed directly onto substrate. Substrate and electrodes of capacitive converters are made of semiconductor material. Gyro allows measuring value of angular velocity around X axis disposed at surface of substrate and Z axis directed in perpendicular to surface of gyro's substrate.

EFFECT: improved precision of measurement.

3 dwg