REACTOR FOR PLASMA-CHEMICAL SEDIMENTATION OF SUBSTANCES FROM A GASEOUS PHASE Russian patent published in 2005 - IPC

Abstract RU 2258763 C1

FIELD: deposition of decorative coatings on items out of glass, ceramics, china, etc.

SUBSTANCE: the invention is pertaining to the field of deposition of decorative coatings on coatings on items out of glass, ceramics, china, etc. in a bulk production of the consumer goods. The reactor contains a vacuum chamber with an electrode and a heater located inside it, and HF-generator electrically connected to the indicated electrode. In the bottom of the vacuum chamber there is a hollow protrusion, inside which a heater is located. The electrode is made in the form of the shelf as a ring embracing the indicated protrusion. In result of such design of the reactor the invention allows to simplify the electrode system design of the plasma-chemical reactor and to increase its efficiency.

EFFECT: the invention ensures simplification of the design of the plasmochemical reactor electrode system and an increase of the reactor efficiency.

3 cl, 2 dwg

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RU 2 258 763 C1

Authors

Kas'Janov S.E.

Shloma V.D.

Dates

2005-08-20Published

2004-02-16Filed