FIELD: measuring technology.
SUBSTANCE: invention relates to measuring technology and can be used to create micromechanical linear acceleration sensors and gyroscopes. The sensing element of the micromechanical accelerometer contains an outer frame, on which are formed attachment pads to the plates, an inertial mass connected by one side to the elastic elements, and the other ends of the elastic elements are connected to the outer frame. A beam is formed on one side of the outer frame, in the center of symmetry. A crossbar is formed, to which the elastic elements are attached at one end, and the elastic elements are connected with the inertial mass at the other end. A T-shaped slot is formed in the center of the beam. On both sides of the leg of the T-shaped slot, L-shaped slots are formed.
EFFECT: increased accuracy of the micromechanical accelerometer.
1 cl, 2 dwg
| Title |
Year |
Author |
Number |
| MICROMECHANICAL ACCELEROMETER WITH HIGH RESISTANCE TO THERMOMECHANICAL STRESSES |
2021 |
- Kostornoj Andrej Nikolaevich
- Aksenov Konstantin Sergeevich
- Brykalo Sergej Sergeevich
- Tkachev Aleksandr Vyacheslavovich
- Kashaev Aleksandr Aleksandrovich
- Malygin Sergej Vladimirovich
- Bolshakov Dmitrij Sergeevich
|
RU2774824C1 |
| MICROMECHANICAL ACCELEROMETER WITH LOW SENSITIVITY TO THERMOMECHANICAL INFLUENCES |
2020 |
- Kostornoj Andrej Nikolaevich
- Mironov Sergej Gennadevich
- Aksenov Konstantin Sergeevich
- Brykalo Sergej Sergeevich
- Tkachev Aleksandr Vyacheslavovich
- Kashaev Aleksandr Aleksandrovich
- Malygin Sergej Vladimirovich
|
RU2746762C1 |
| MICROMECHANICAL ACCELEROMETER |
2020 |
- Kostornoj Andrej Nikolaevich
- Mironov Sergej Gennadevich
- Aksenov Konstantin Sergeevich
- Brykalo Sergej Sergeevich
- Tkachev Aleksandr Vyacheslavovich
- Kashaev Aleksandr Aleksandrovich
- Malygin Sergej Vladimirovich
|
RU2753475C1 |
| MICROMECHANICAL ACCELEROMETER SENSOR ELEMENT |
2020 |
- Kostornoj Andrej Nikolaevich
- Mironov Sergej Gennadevich
- Aksenov Konstantin Sergeevich
- Brykalo Sergej Sergeevich
- Tkachev Aleksandr Vyacheslavovich
- Kashaev Aleksandr Aleksandrovich
- Malygin Sergej Vladimirovich
|
RU2748290C1 |
| SOLID STATE LINEAR ACCELERATION SENSOR |
2020 |
- Kostornoj Andrej Nikolaevich
- Mironov Sergej Gennadevich
- Aksenov Konstantin Sergeevich
- Brykalo Sergej Sergeevich
- Tkachev Aleksandr Vyacheslavovich
- Kashaev Aleksandr Aleksandrovich
- Malygin Sergej Vladimirovich
|
RU2746112C1 |
| MICROMECHANICAL ACCELEROMETER |
2020 |
- Kostornoj Andrej Nikolaevich
- Mironov Sergej Gennadevich
- Aksenov Konstantin Sergeevich
- Brykalo Sergej Sergeevich
- Tkachev Aleksandr Vyacheslavovich
- Kashaev Aleksandr Aleksandrovich
- Malygin Sergej Vladimirovich
- Komarova Marina Yurevna
- Radaev Viktor Alekseevich
|
RU2746763C1 |
| MICROMECHANICAL ACCELEROMETER |
2012 |
- Chaplygin Jurij Aleksandrovich
- Timoshenkov Sergej Petrovich
- Shilov Valerij Fedorovich
- Mironov Sergej Gennad'Evich
- Kirgizov Sergej Viktorovich
- Glazkov Oleg Nikolaevich
- Anchutin Stepan Aleksandrovich
- Kochurina Elena Sergeevna
- Timoshenkov Aleksej Sergeevich
|
RU2515378C1 |
| SENSING ELEMENT OF MICROMECHANICAL ACCELEROMETER |
2011 |
- Chaplygin Jurij Aleksandrovich
- Timoshenkov Sergej Petrovich
- Shilov Valerij Fedorovich
- Mironov Sergej Gennad'Evich
- Kirgizov Sergej Viktorovich
- Glazkov Oleg Nikolaevich
- Golovan' Anton Sergeevich
- Timoshenkov Aleksej Sergeevich
- Kochurina Elena Sergeevna
- Anchutin Stepan Aleksandrovich
- Rubchits Vadim Grigor'Evich
|
RU2492490C1 |
| SENSITIVE ELEMENT OF MICROMECHANICAL COMPENSATION ACCELEROMETER |
2012 |
- Timoshenkov Sergej Petrovich
- Shilov Valerij Fedorovich
- Mironov Sergej Gennad'Evich
- Kirgizov Sergej Viktorovich
- Glazkov Oleg Nikolaevich
- Timoshenkov Aleksej Sergeevich
|
RU2497133C1 |
| SOLID-STATE LINEAR ACCELERATION SENSOR |
2018 |
- Timoshenkov Sergej Petrovich
- Kalugin Viktor Vladimirovich
- Anchutin Stepan Aleksandrovich
- Timoshenkov Andrej Sergeevich
- Dernov Ivan Sergeevich
- Zaryankin Nikolaj Mikhajlovich
- Vinogradov Anatolij Ivanovich
- Timoshenkov Aleksej Sergeevich
|
RU2692122C1 |
