MICROMECHANICAL ACCELEROMETER Russian patent published in 2021 - IPC G01P15/00 

FIELD: professional equipment.

SUBSTANCE: invention relates to the field of instrument engineering. The micromechanical accelerometer contains a base, a sensing element consisting of upper and lower caps, an inertial mass, and a separation layer. The separation layer additionally contains a decoupling plane, a glass substrate. In the decoupling plane, elastic-deformable beams are formed with mounting pads located on them to the lower cover of the sensor element and the glass substrate, and to the glass substrate from the lower side, and to the lower cover of the sensor element from the upper side of the decoupling plane. Elastic-deformable beams in the areas between the mounting pads, as well as in the areas between the mounting pads and the decoupling plane are made in the form of a meander with “x” number of bends.

EFFECT: increased accuracy of the micromechanical accelerometer.

1 cl, 2 dwg