SENSING ELEMENT OF MICROMECHANICAL ACCELEROMETER Russian patent published in 2013 - IPC G01P15/08 

FIELD: measuring equipment.

SUBSTANCE: sensing element made of monocrystalline silicon of low conductivity, comprises a central area connected to the glass substrate on which the electrodes of capacitive transducer are located, an outer frame with platform of fastening, connected to the inertial mass through the cross-shaped torsions. The central platform is connected to the inertial mass through the bending elastic elements. Between the place of incorporation of the end of the cross-shaped torsion in the inertial mass (pendulum) and bending elastic elements along the pendulum a through slot is located on both sides relative to the central platform of fastening. Introduction of the central platform of fastening and additional bending elastic elements reduces zero signal and its instability, and in the simultaneous influence of the measured acceleration it reduces the steepness error of the overall characteristic of the instrument.

EFFECT: introduction of through slots reduces significantly the deformation transmitted to the cross-shaped torsions and the bending elastic elements under the influence of above-zero and below-zero temperatures.

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