FIELD: measurement equipment.
SUBSTANCE: invention is related to metering equipment and may be used to create micromechanical accelerometres and gyroscopes. Sensor comprises sensitive element (SE) of pendulum type, which is fixed to SE frame by means of elastic suspensions. With the help of supports, frame is fixed to device foundation, there are through slots provided in frame along its whole perimetre. It makes it possible to increase distance from areas of supports fixation to elastic suspension and to reduce impact of contact stresses at elastic suspension.
EFFECT: reduced instability of zero and increased accuracy of device.
1 dwg
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Authors
Dates
2010-01-20—Published
2008-10-16—Filed