FIELD: measurement technology.
SUBSTANCE: invention relates to measurement technology, it can be used in micromechanical accelerometers. The sensor element of the micromechanical accelerometer contains a single-crystal silicon pendulum, upper and lower plates, and an external frame connected to the pendulum via elastic torsion bars. Additionally, the upper and lower fixed plates are formed. An additional support frame is formed, made in the form of elastic-deformable beams. The additional support and external frames are mated through the formed jumpers. Through slits are formed in the jumpers. A solid contour is formed on the outer frame for attaching the upper and lower plates.
EFFECT: increased accuracy of the micromechanical accelerometer.
3 cl, 4 dwg
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