FIELD: nano-technological equipment engineering.
SUBSTANCE: probe with base has from 1 to 50 needles. Base diameter is from 10 to 30 nm. Length is from 10 to 300 nm. Needle tip curvature radius is 0,7-2 nm. Needles are made of substance with polycrystalline structure. Method for making probe for scanning probe microscopy includes growing needles at tip of probe base. Tip of probe base is positioned on electrode. Growing is performed in steams of organic connection, containing material element of needles. By means of vacuum dispersion in high-frequency charge. To electrode, with probe base positioned thereupon, positive voltage is applied.
EFFECT: universality, higher productiveness, increased resolution of produced probes due to production of probes with lesser radius.
2 cl, 1 dwg
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