SUBSTRATE FOR GROWING EPITAXIAL LAYERS OF GALLIUM ARSENIDE Russian patent published in 2006 - IPC C30B19/12 C30B25/18 C30B29/10 C30B29/42 C30B15/00 

Abstract RU 2267565 C2

FIELD: manufacture of mono-crystalline materials and films, possibly used for making semiconductor materials suitable for solar cells, integrated circuit boards, solid-state SHF-devices.

SUBSTANCE: method comprises steps of using as material of substrates for growing films of GaAs (100) mono-crystals of intermetallic compounds made of one of binary alloys such as NiAl, CoAl, AlTi, NiGa.

EFFECT: possibility for growing mirror epitaxial films of GaAs in wider temperature range of deposition and over-saturation, simplified process for making devices of reduced cost.

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RU 2 267 565 C2

Authors

Ajtkhozhin Sabir Abenovich

Dates

2006-01-10Published

2003-12-11Filed