FIELD: time standards.
SUBSTANCE: proposed time standard 1 fully integrated in one substrate has resonator 4 and integrated circuit 3 designed to excite resonator oscillations as well as to pick definite-frequency signal off resonator. The latter is, essentially, adjustable integrated micromechanical tuning-fork resonator 4 installed on top of substrate 2 and designed for oscillating in plane parallel to substrate. Adjustable tuning-fork resonator has member 5 passed perpendicular to substrate, continuous-wave structure 6 connected to base member and incorporating at least pair of tuning-fork legs 7, 8 and electrode 9 disposed close to tuning-fork legs and connected to integrated circuit 3.
EFFECT: enhanced resonator quality factor and frequency stability, reduced power requirement.
18 cl, 12 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| TIMING SYSTEM INCORPORATING INTEGRATED MICROMECHANICAL RING RESONATOR | 2000 |
|
RU2249299C2 |
| TUNING-FORK MEASURING TRANSFORMER OF MECHANICAL STRESSES AND DEFORMATIONS | 2014 |
|
RU2569409C1 |
| MICROELECTROMECHANICAL PRIMARY ACCELERATION TRANSDUCER | 2017 |
|
RU2657351C1 |
| TUNING FORK MICROGYROSCOPE | 2014 |
|
RU2580871C1 |
| PIEZOELECTRIC TUNING FORK | 0 |
|
SU726653A1 |
| MICROMECHANICAL SYSTEM | 2012 |
|
RU2522878C1 |
| INTEGRAL MICROMECHANICAL GYROSCOPE | 2021 |
|
RU2778622C1 |
| MASS SPECTROMETER FOR MACROMOLECULE ANALYSIS | 2006 |
|
RU2332748C1 |
| INTEGRATED SENSITIVE ELEMENT OF VIBRATION GYROSCOPE | 2011 |
|
RU2453812C1 |
| MICROELECTROMECHANICAL SYSTEM FOR ANGULAR VELOCITY SENSOR | 2011 |
|
RU2580879C2 |
