METHOD OF THE VACUUM-IONIC-PLASMIC DEPOSITION OF THE MULTILAYERED COMPOSITES, CONTAINING THE COMPLEX CARBIDES Russian patent published in 2006 - IPC C23C14/24 

FIELD: mechanical engineering; electronic industry; optical industry; other industries; methods of spraying of the vacuum-plasma coatings.

SUBSTANCE: the invention pertaining to the field of mechanical engineering and may be used for a spraying of the vacuum-plasma coatings in electron, optical and other industries. The method provides for deposition of the multilayered composites containing the complex carbides. Deposition of the layers with the width less than 100 nanometers is conducted out of plasma generated by the electric arc evaporators arranged in the vacuum chamber. The deposition of the layers is conducted in the additional ionic bombardment by ions of argon using the electric arc evaporators containing cathodes made out of titanium and black lead alloyed by silicon. The cathodes are placed on the side surface of the vacuum chamber at an angle of 120°C to each other. In the process of deposition of the layers the working tool with the fixed on it the treated details is uniformly rotating around its axis with the a simultaneous rotation around the axis of the support. The technical result of the invention is an increase of the operational properties of the details, such as the corrosion resistance and the microhardness of the details surfaces.

EFFECT: the invention ensures an increase of the details operational properties - the corrosion resistance and the microhardness of the details surfaces.

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