INTEGRAL MICRO-MECHANICAL ACCELERATION METER - CLINOMETER Russian patent published in 2006 - IPC G01P15/02 

FIELD: measuring equipment engineering, possible use for measuring acceleration and angle of inclination.

SUBSTANCE: device additionally includes additional inertial mass made of photoresist, three additional immoveable electrodes of capacity transformers of movements, made of semiconductor material and positioned directly on semiconductor substrate so, that they form flat capacitors with inertial mass. Four additional moveable electrodes of capacity movement transformers are made in form of plates with comb-shaped structures of semiconductor material and are positioned with a gap relatively to semiconductor substrate.

EFFECT: expanded functional capabilities.

2 dwg