VACUUM-ARC SOURCE OF PLASMA FOR TREATMENT OF THE TUBULAR PRODUCTS OF THE COMPLEX GEOMETRY Russian patent published in 2006 - IPC C23C14/24 

FIELD: vacuum-arc sources of plasma devices for deposition of the coatings on the products in vacuum.

SUBSTANCE: the invention is pertaining to the devices for deposition of the coatings on the products in vacuum and may find application for production of the metal coatings on the inner surfaces of the tubular products with the solid walls and with the complex internal relief. The vacuum-arc source of plasma contains: the lengthy cylindrical cathode (1), the cathode current leads (2) and (11), the keep-alive electrodes (4) and (10), the tool of the arc quenching made in the form of the time relay with a wiring (5), which is connected by the breaking contact pair in the arc power circuit, and the anodes (7) and (9), which are made in the form of the peg-shaped yoke encompassing a coated tubular hardware product (8) and enveloping the being coated tubular product (8) and the electrically connected with the time relay with a wiring (5), and the switchboard (12). The anodes (7) and (9), the cathode current leads (2) and (11) and keep-alive electrodes (4) and (10) are arranged on the opposite ends of the lengthy cylindrical cathode (1). The ends of the cylindrical cathode (1) through the current leads (2) both (11) and the normally-closed and normally-opened contact of the first contacting pair of the switchboard (12) are connected to the negative pole of the arc power supply (3). Anodes (7) and (9) through the normally-closed and normally-opened contact of the second contacting pair of the switchboard (12) are connected through opening contacting pair of the time relay to the positive pole of the arc power supply (3). The keep-alive electrodes (4) both (10) through normally-closed and normally-opened contact of the third contacting pair of the switchboard (12) are connected to the positive pole of the wiring (5) of the time relay. Such a design of the source of plasma has allowed to exclude the poor adhesions of the coating on the inner surfaces of the complex relief tubular products.

EFFECT: the invention ensures exclusion of the poor adhesions of the coating on the inner surfaces of the complex relief tubular products.

1 dwg, 1 tbl