METHOD FOR PRODUCTION OF MICROSTRUCTURES Russian patent published in 2007 - IPC B81C1/00 

FIELD: micro- and nanotechnologies for processing materials using laser radiation.

SUBSTANCE: in the method microstructures are produced under effect from laser radiation on surface of material adjacent to gas with following cooling by means of heat draining. Material is selected capable of absorbing in middle infrared spectrum and having low temperature expansion coefficient, for which ρ_l=ρ_s, where ρ_l - density of material in liquid phase state at melting temperature; ρ_s - density of material in solid phase state at melting temperature; effect zone size is selected not to exceed the value determined from condition. Bo=1/3, where Bo - Bond number, effect is performed by means of radiation of continuous or quasi-continuous laser of middle infrared spectrum, density of radiation power and time of effect are selected on basis of condition τ>T₀, where τ - time of consolidation of flux formed as a result of effect, T₀ - time of forming of quasi-balanced boundary between flux and gas under effect from surface tension forces.

EFFECT: creation of productive, ecologically clean, high manufacturability method for producing microstructures with flat bottom of both cellular and channel type.

6 cl, 3 dwg