METHOD OF LASER PROCESSING OF NONMETALLIC PLATES Russian patent published in 2018 - IPC H01L21/42 B23K26/00 G01N25/72 

FIELD: technological processes.

SUBSTANCE: invention relates to the technological processes and can be used for laser annealing of plates of semiconductor, ceramic and glass-like materials. Technical result is achieved by the fact that in the method of laser processing of nonmetallic plates having a free surface, consisting in irradiating their surface with continuous laser emission with energy density sufficient to reach the annealing temperature of the plate surface, condition of thermostability of the plate is calculated from the equation relating mechanical properties of the material and the function of Fourier criterion, and, when failure, the plate is preheated to a temperature determined from the condition of thermostability.

EFFECT: technical result of the invention is to eliminate the destruction of plates by thermoelastic stresses during processing and increase the yield of suitable ones.

1 cl, 2 dwg