INTEGRAL TUNNEL ACCELEROMETER Russian patent published in 2016 - IPC G01P15/02 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measurement equipment and microsystems. This invention consists in the fact that the device additionally includes four additional fixed electrodes, made with comb-shaped structures made of semiconducting material and located directly on semiconducting substrate, four movable electrode made in form of plates with perforation and comb-shaped structures made of semiconducting material and arranged with clearance relative to the semiconductor substrate so that they form tunnel contacts with additional fixed electrodes in the plane of their plates, the second and the third additional inertia masses made in the form of perforated plates of semiconducting material and arranged with clearance relative to the semiconducting substrate so that they form tunnel contacts with fixed electrodes in the plane of their plates, twelve additional spring beams, made of semiconducting material and arranged with clearance relative to semiconducting substrate, two torsion bars made of semiconducting material and arranged with clearance relative to semiconducting substrate, two additional supports made of semiconducting material and located directly on semiconducting substrate.

EFFECT: technical result is possibility of measuring values of linear acceleration along axes X and Y, mutually perpendicular in plane of the substrate, and the Z axis directed perpendicular to plane of the substrate.

1 cl, 2 dwg