FIELD: measuring technique.
SUBSTANCE: tin-film pressure gage comprises housing, round diaphragm with the peripheral base over which the diaphragm is secured to the housing, and peripheral and radial strain gages made of strain members, interconnected via the cross-pieces made of low-ohm material, and connected in opposite arms of the measuring bridge. Each strain member is made of microscopic strain members uniformly arranged within the strain members and interconnected through thin-film cross-pieces. The thin-film cross-pieces are partially shortened via the additional cross-pieces.
EFFECT: enhanced precision.
3 dwg
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|---|---|---|---|
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|
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|
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| THIN-FILM PRESSURE SENSOR | 2009 |
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| THIN-FILMED PRESSURE TRANSDUCER | 2004 |
|
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|
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| PRESSURE SENSOR OF STRAIN GAUGE TYPE WITH A THIN FILM NANO- AND MICROELECTROMECHANICAL SYSTEM | 2017 |
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