THIN-FILM DATA UNIT OF PRESSURE Russian patent published in 2009 - IPC G01L9/04 G01L7/08 

FIELD: physics, measuring.

SUBSTANCE: invention is intended for measuring of pressure in the conditions of action of a wide gamut of temperatures. The data unit contains case 1, round membrane 2 with peripheral warrants 3 on which the membrane 2 is anchored in the case 1. Resistance strain gauges 5 are executed in the form of identical quantity of tensoelements 6, having the identical shape. The radial tensoelements 6, included in two opposite shoulders of the measuring bridge, are located on periphery of a membrane 2. One of the crosspieces 4 pairing resistance strain gauges 5, has two contact platforms 7 joined by a resistive strip 8 which separate sites are short-circuited by additional crosspieces 9. Other two shoulders of the measuring bridge are executed in the form of radial tensoelements 10, located on boundary of a thin part of a membrane 2 and the rigid centre 11 executed on a membrane 2. Disposed in the field of the rigid centre 11 and on a thin part of a membrane of 2 crosspieces 12 and 13, uniters tensoelements 10 accordingly, are identical disposed on a thin part of a membrane 2 and in the field of the peripheral warrant to 3 crosspieces 14 and 15, the uniter tensoelements 6. The radius of arcs of the circles featured around tensoelements 10 is equal to radius of arcs of the circles featured around tensoelements 6. The sizes of the tensoelements 6 and 10, membranes 2, quantity of radius and co-ordinate of centres of arcs of the circles featured around tensoelements 6 and 10, are related by certain relations.

EFFECT: error reduction, sensitivity increase.

3 dwg