FIELD: microelectronics; thin-film microassemblies; developing and producing thin-film resistors on insulating substrates.
SUBSTANCE: proposed thin-film resistor has rectangular resistor unit, two opposing comb-shaped electrodes of multilayer conductive structure, and n rectangular resistor units with n ≥ 2 disposed in parallel with electrode width; in addition it has (n - 1) rectangular resistor units disposed between crests of one of electrodes and bases of other electrode so that resistive strip of uniform resistive material formed between electrodes acquires meander-like shape of equal width free from breaks.
EFFECT: simplified design, facilitated manufacture, reduced low value of resistance range at desired topologic and design dimensions.
1 cl, 6 dwg
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