FIELD: physics.
SUBSTANCE: invention relates to calibration of transmission electron microscopes (TEM) when taking measurements in nano- and sub-nanometre ranges. The test object is in form of a sample holder with multiple places for mounting analysed objects, in one of which there is a reference structure in form of a thin cross section of a silicon structure with a periodic relief surface, having a known interplanar distance and known dimensions of trapezoid elements of the relief.
EFFECT: high accuracy of calibrating TEM, which increases accuracy measuring length of sections which characterise the profile of the relief element in a wide range of lengths using TEM, simultaneous determination of the scaling coefficient of TEM on two axes and linearity and orthogonality of said axes.
9 dwg
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