TEST OBJECT FOR CALIBRATING ELECTRON-SCAN MICROSCOPES Russian patent published in 2003 - IPC

FIELD: electronic microscopy. SUBSTANCE: test object for calibrating electron-scan microscopes is in the form of periodical monocrystalline silicon structure with relief spacing surface whose members have trapezoidal profile in which projection values of lateral faces on base plane exceed diameter of probe of electron-scan microscope. All members of relief spacing surface have fixed acute angle between lateral face of trapezium and plane of its lower base. Said acute angle is equal to 54.7 degrees and it is formed by crossing of crystallographic planes (100) and (111) of monocrystalline silicon due to its anysotropic etching. Test object may be made according to standard technological processes of microelectronics at using pholytography and anysotropic etching in aqueous KOH solution of monocrystalline silicon plate whose working surface is oriented in crystallographic plane (111). EFFECT: enhanced accuracy, shortened time period for measuring linear dimensions of integrated circuits by means of electron-scan microscopes. 2 cl, 2 dwg