FIELD: technological processes.
SUBSTANCE: in integrated hollow nanoneedle tube is connected with crystal-base via bent film element and it is rigidly secured. Tube and bent film element are made of film structure with mechanically stressed layers grown on crystal-base as pseudo-morph monocrystal substance films with different lattice spacing liberation. The contour of a segment of film structure to be released from connection with crystal-base is formed. The released segment contains sectors intended for formation of tube and bent film element. Configuration of sectors, inner mechanical stresses, and thickness of layers determine with precision tube positioning and its diameter. Directional material etching under released mechanically stressed layers separates the first sector from crystal-base transforming it into tube owing to stresses, then the second sector is separated bending owing to stresses and securing tube positioning. Rigid connection is effected by fixing element.
EFFECT: workability increase and expansion of articles' functional range.
17 cl, 9 dwg
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