METHOD OF MAKING TUBULAR MICRO-, NANO-NEEDLE IN INTEGRATED FORM Russian patent published in 2011 - IPC G01Q70/16 B82B3/00 

FIELD: physics.

SUBSTANCE: method is meant for designing nano-devices, particularly tubular probes used in scanning microscopy, as well as in medicine, biochemistry, cytology and genetics when conducting researches with injections and/or sampling tissue and liquids on a cellular level. A multilayer film structure with internal mechanical stress is formed on a substrate crystal. A contuour of the freed region of the multilayer film structure is formed from the substrate crystal, having an area for making a tube. An area having a current conductor to the tube and a contact pad is also formed in the multilayer film structure. During formation, a dielectric film is made, on which an electroconductive film is deposited. Through lithography on the electroconductive film, the contour of the area meant for making the tube is set, as well as an area with a current conductor and a contact pad. The first of the areas is in form of a figure with geometry which, when freed from connection with the substrate crystal and transformation into the tube, enables folding of the edges of the multilayer film structure at the end of the tube on a conic spiral. Using lithography, the dielectric film of the area meant for making the tube is covered, as well as the area with the current conductor and contact pad, including ends. Similarly, a paired multilayer film structure is formed on the said multilayer film structure. Areas of both structures meant for making a tube are interfaced at a point which is the centre of symmetry relative the direction of freeing from connection with the substrate crystal and transformation into the tube, of each of the areas meant for making the tube. Material of the substrate crystal is removed from under each area meant for making the tube, thus transforming areas through internal mechanical stress into a tube with sharp ends at the point of rapture at the interface point, arising as a result of different directions of transformation projecting beyond the edges of thee substrate crystal.

EFFECT: increase in sharpness of the needles to a value required to obtain a surface image with atomic resolution, achieving unification of the needle when making said needle as a probe for microscopy; reduced damages to biological cells when making the needle for conducting invasive manipulations.

11 cl, 4 dwg