PRODUCTION METHOD OF TIN-DOPED INDIUM PHOSPHIDE MONOCRYSTALS Russian patent published in 2009 - IPC H01L21/263 

Abstract RU 2344510 C2

FIELD: chemistry.

SUBSTANCE: production method of tin-doped indium phosphide monocrystals includes as follows. Undoped indium phosphide monocrystal is exposed to entire reactor neutron spectrum, further heated, annealed and cooled. Heating and cooling are carried out at certain speed, while annealing is carried out at temperature specified by presented dependence.

EFFECT: possibility to produce tin-doped high-concentrated indium phosphide wafers, to improve uniformity of tin distribution and electron mobility.

1 tbl

Similar patents RU2344510C2

Title Year Author Number
METHOD OF PRODUCING MONO-CRYSTALS OF INDIUM ANTIMONIDE ALLOYED WITH TIN 2006
  • Kolin Nikolaj Georgievich
  • Merkurisov Denis Igorevich
  • Bojko Vladimir Mikhajlovich
RU2344209C2
METHOD OF PRODUCING MONO-CRYSTALLINE PLATES OF ARSENIDE-INDIUM 2006
  • Kolin Nikolaj Georgievich
  • Merkurisov Denis Igorevich
  • Bojko Vladimir Mikhajlovich
RU2344211C2
METHOD OF PRODUCING SEMI-INSULATING GALLIUM ARSENIDE 1992
  • Kolin N.G.
  • Kosushkin V.G.
  • Narochnyj K.N.
  • Nojfekh A.I.
  • Svistel'Nikova T.P.
RU2046164C1
METHOD OF PROCESSING MONOCRYSTALLINE EPITAXIAL LAYERS OF GROUP III NITRIDES 2006
  • Kolin Nikolaj Georgievich
  • Merkurisov Denis Igorevich
  • Bojko Vladimir Mikhajlovich
RU2354000C2
DOPING TECHNIQUE OF EPITAXIAL NITRIDE LAYERS OF GALLIUM BY GERMANIUM 2006
  • Kolin Nikolaj Georgievich
  • Merkurisov Denis Igorevich
  • Bojko Vladimir Mikhajlovich
RU2354001C2
METHOD OF PRODUCTION OF RESISTIVE SILICON 2002
  • Mil'Vidskij M.G.
  • Pil'Don V.I.
  • Kozhitov L.V.
  • Timoshina G.G.
RU2202655C1
METHOD FOR REDUCING CONCENTRATION OF POST-RADIATION FLAWS IN NEUTRON-DOPED SILICON DURING ITS PULSE RADIATION TREATMENT 1999
  • Prokhorov A.M.
  • Petrov G.N.
  • Ljashchenko B.G.
  • Garusov Ju.V.
  • Shevchenko V.G.
RU2162256C1
METHOD FOR HEAT TREATMENT OF HIGHLY ALLOYED MONOCRYSTALS OF SILICIUM 1996
  • Shimanskij A.F.
  • Krasnova E.V.
  • Kargin V.F.
  • Tupaev V.M.
  • Leonov V.V.
RU2094549C1
METHOD FOR FORMING POLYCRYSTALLINE HIGHLY DOPED INAS NANOLAYER ON SAPPHIRE SUBSTRATE FOR RADIATION-RESISTANT MAGNETIC FIELD SENSORS 2022
  • Vasilevskij Ivan Sergeevich
  • Vinichenko Aleksandr Nikolaevich
  • Kargin Nikolaj Ivanovich
  • Klochkov Aleksej Nikolaevich
  • Safonov Danil Andreevich
RU2785803C1
METHOD OF MEASURING FLUENCE OF SLOW NEUTRONS USING MONOCRYSTALLINE SILICON 2011
  • Varlachev Valerij Aleksandrovich
  • Emets Evgenij Gennad'Evich
  • Solodovnikov Evgenij Semenovich
RU2472181C1

RU 2 344 510 C2

Authors

Kolin Nikolaj Georgievich

Merkurisov Denis Igorevich

Bojko Vladimir Mikhajlovich

Dates

2009-01-20Published

2006-11-17Filed