METHOD OF PRODUCING MONO-CRYSTALLINE PLATES OF ARSENIDE-INDIUM Russian patent published in 2009 - IPC C30B33/04 C30B33/02 C30B29/40 

Abstract RU 2344211 C2

FIELD: metallurgy, crystal growing.

SUBSTANCE: invention refers to semi-conductor technology of AIIIBV type compositions. The method is implemented by means of bombarding mono-crystalline plates of arsenide-indium with fast neutrons with following heating, annealing and cooling. The mono-crystalline plates are subject to bombardment with various degree of compensation at density of flow not more, than 1012 cm-2 c-1 till fluence F=(0.5÷5.0)·1015 cm-2 , while annealing is carried out at 850÷900°C during 20 minutes at the rate of heating and cooling 10 deg/min and 5 deg/min correspondingly.

EFFECT: production of arsenide-iridium plate with upgraded uniformity and thermal-stability of electro-physical characteristics and with decreased degree of compensation.

2 ex, 1 tbl

Similar patents RU2344211C2

Title Year Author Number
METHOD OF PRODUCING SEMI-INSULATING GALLIUM ARSENIDE 1992
  • Kolin N.G.
  • Kosushkin V.G.
  • Narochnyj K.N.
  • Nojfekh A.I.
  • Svistel'Nikova T.P.
RU2046164C1
PRODUCTION METHOD OF TIN-DOPED INDIUM PHOSPHIDE MONOCRYSTALS 2006
  • Kolin Nikolaj Georgievich
  • Merkurisov Denis Igorevich
  • Bojko Vladimir Mikhajlovich
RU2344510C2
METHOD OF PRODUCING MONO-CRYSTALS OF INDIUM ANTIMONIDE ALLOYED WITH TIN 2006
  • Kolin Nikolaj Georgievich
  • Merkurisov Denis Igorevich
  • Bojko Vladimir Mikhajlovich
RU2344209C2
METHOD OF PROCESSING MONOCRYSTALLINE EPITAXIAL LAYERS OF GROUP III NITRIDES 2006
  • Kolin Nikolaj Georgievich
  • Merkurisov Denis Igorevich
  • Bojko Vladimir Mikhajlovich
RU2354000C2
DOPING TECHNIQUE OF EPITAXIAL NITRIDE LAYERS OF GALLIUM BY GERMANIUM 2006
  • Kolin Nikolaj Georgievich
  • Merkurisov Denis Igorevich
  • Bojko Vladimir Mikhajlovich
RU2354001C2
METHOD OF MEASURING FLUENCE OF SLOW NEUTRONS USING MONOCRYSTALLINE SILICON 2011
  • Varlachev Valerij Aleksandrovich
  • Emets Evgenij Gennad'Evich
  • Solodovnikov Evgenij Semenovich
RU2472181C1
METHOD OF MEASURING FAST NEUTRON FLUENCE WITH SEMICONDUCTOR MONOCRYSTALLINE DETECTOR 2013
  • Varlachev Valerij Aleksandrovich
  • Golovatskij Aleksej Vasilevich
  • Emets Evgenij Gennadevich
  • Solodovnikov Evgenij Semenovich
RU2523611C1
METHOD OF DETERMINATION OF CONTENT OF IMPURITY IN CRYSTALLINE SILICON 1991
  • Lozovskij A.D.
  • Panesh A.M.
  • Simonov A.P.
RU2013821C1
METHOD FOR PRODUCTION OF INDIUM AMMONIDE LARGE-SIZE MONOCRYSTALS 2012
  • Ezhlov Vadim Sergeevich
  • Mil'Vidskaja Alla Georgievna
  • Molodtsova Elena Vladimirovna
  • Kolchina Galina Petrovna
  • Mezhennyj Mikhail Valer'Evich
  • Reznik Vladimir Jakovlevich
RU2482228C1
METHOD OF PRODUCTION OF RESISTIVE SILICON 2002
  • Mil'Vidskij M.G.
  • Pil'Don V.I.
  • Kozhitov L.V.
  • Timoshina G.G.
RU2202655C1

RU 2 344 211 C2

Authors

Kolin Nikolaj Georgievich

Merkurisov Denis Igorevich

Bojko Vladimir Mikhajlovich

Dates

2009-01-20Published

2006-11-17Filed